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PSG


phospho-silicate glass (film)

燐酸シリケートガラス. 燐珪酸ガラス.
phospho-silicate glass (film); ref. BPSG(boro-phospho-silicate glass); e.g. deposited by PECVD(plasma enhanced chemical vapor deposition);
[C:Chem:Mat:Opt:Ind].




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