略語大辞典 [Opt] 29 RECS real-time emissivity correction system (半導体急速熱処理用の)実時間発光補正システム.real-time emissivity correction system; a device for RTP(rapid thermal processing); ref. LICS(lamp interferencecorrection system); [Opt:L:Ind:Phys]. 丸善「略語大辞典」JLogosID : 11857611