略語大辞典 [C] 23 SPA surface photo-absorption 表面光吸収(測定). 化合物半導体結晶成長の光学的モニター法. その場観察法. surface photo-absorption; a technique for monitoring compound semiconductor growth; ref. RDS(reflectance difference spectroscopy); [C:E:Opt:L:Mat]. 丸善「略語大辞典」JLogosID : 11860083