略語大辞典 [E] 27 VRTP very rapid thermal processing 超高速熱処理. ポリシリコン形成のための処理.very rapid thermal processing; a manufacturing technique of active matrix flat panel displays; directed at the crystallization of amorphous or amorphized silicon to produce device quality polysilicon films; a critical step in th 丸善「略語大辞典」JLogosID : 11850536