RTA
![](dev/images/h-r-.png)
rapid thermal annealing
(半導体結晶の一部の)急速熱アニーリング. 急速除熱処理. 急速冷却処理. 局所的に結晶構造組成の不整を作る方法.
rapid thermal annealing; of a semiconductor crystal with a mask to accomplish localized compositional disordering; an RTP(rapid thermal processing); e.g. used for IILD(impurity-induced layer dis
![](dev/images/h-r-.png)
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