EBIC
(modulated) electrom-beam-induced current
電子顕微鏡の観測モードの一つ.
(modulated) electrom-beam-induced current; in a semiconductor; an analytical mode of a SEM(scanning electron microscope); ref. CL(cathodo-luminescence);
[E:Phys:Mat].(半導体での)電子ビーム誘起電流. 走査型
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