略語大辞典 [E] 32 ESC electrostatic chuck 静電チャック. 半導体基板(ウェーハー)を処理中に誘電体を介して静電気により保持する装置.electrostatic chuck; a device to hold a semiconductor wafer with an electrostatic force distributed according to electrode layout; prevents bowing of a wafer; provides uniform heat transfer over the entire 丸善「略語大辞典」JLogosID : 11874037