OSVSC
![](dev/images/h-r-.png)
open-source vacuum system controller;
オープンソース真空システム制御装置. イオンポンプの安全装置.
open-source vacuum system controller;provides fail-safe operation of an ion pump; if an ion pump current exceeds asafe level, the OSVSC will close the isolation valve to protect both the QMA(quadrupole mass analyzer) and
![](dev/images/h-r-.png)
![]() | 丸善 「略語大辞典」 JLogosID : 11881843 |