TDS

thermal desorption spectrometry
昇温脱離ガス分析法. 熱離脱分光. 昇温脱離分光法. 表面分析法の一つ.
thermal desorption spectrometry; a surface contamination analysis; ref. SNMS(secondary neutral mass spectrometry), TXRF(total reflection x-ray fluorescence analysis), XRF(x-ray fluorescence);
[Chem].

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