VLF
![](dev/images/h-r-.png)
vertical laminar flow (approach)
垂直層流法. クリーンルーム技術.
vertical laminar flow (approach); a contamination control technology in semiconductor industry; ref. ULPA(ultra low penetrate air) filter;
[Env:C:Ind:Chem:Phys].
![](dev/images/h-r-.png)
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