略語大辞典 [Ind] 30 ULP ultra low particle 「超低粒子」状態. 不純物混入の極めて少ない状態.ultra low particle; an expression of low contamination; e.g. in a sputtering system; [Ind:Phys:Chem]. 丸善「略語大辞典」JLogosID : 11853098