略語大辞典 [C] 19 PSG phospho-silicate glass (film) 燐酸シリケートガラス. 燐珪酸ガラス.phospho-silicate glass (film); ref. BPSG(boro-phospho-silicate glass); e.g. deposited by PECVD(plasma enhanced chemical vapor deposition); [C:Chem:Mat:Opt:Ind]. 丸善「略語大辞典」JLogosID : 11856668