RECS

real-time emissivity correction system
(半導体急速熱処理用の)実時間発光補正システム.
real-time emissivity correction system; a device for RTP(rapid thermal processing); ref. LICS(lamp interferencecorrection system);
[Opt:L:Ind:Phys].

![]() | 丸善 「略語大辞典」 JLogosID : 11857611 |