略語大辞典 [Phys] 23 SPM scanning probe microscopy(or microscope) 走査型プローブ顕微鏡. 走査型トンネル顕微鏡, 原子間力顕微鏡などの総称.scanning probe microscopy(or microscope); reveals the surface structure of a material with extremely high lateral resolution by scanning across a sample surface with a small, sensitive probe positioned very close t 丸善「略語大辞典」JLogosID : 11860173