略語大辞典 [Ind] 22 IITS ion implant test site (半導体基板の)イオン注入試験位置.ion implant test site; on a semiconductor wafer; is diffused, metallized, and testedon an automated tester; capable of measuring implant uniformity down to dose levels 1012 with the use of 100 ohm-cm wafers; used to generate sheet re 丸善「略語大辞典」JLogosID : 11878362