ILD
interlayer(or interlevel) dielectric(s) (reflow)
(多層金属層回路の)層間誘電体.
interlayer(or interlevel) dielectric(s) (reflow); of a multi-metal layer interconnect system for bipolar and BiCMOS circuit; e.g. BPSG(borophosphosilicate glass); an IC(integrated circuit) technology;
[C:E:Ind].
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