略語大辞典 [Phys] 17 OSVSC open-source vacuum system controller; オープンソース真空システム制御装置. イオンポンプの安全装置.open-source vacuum system controller;provides fail-safe operation of an ion pump; if an ion pump current exceeds asafe level, the OSVSC will close the isolation valve to protect both the QMA(quadrupole mass analyzer) and 丸善「略語大辞典」JLogosID : 11881843