略語大辞典 [Opt] 27 TW thermal wave (signal) 熱波動. 変調光照射された半導体で生じる.thermal wave (signal); used in a dosimetry by modulated-optical reflectance; a spot on a semiconductor wafer is illuminated with a chopped argon laser beam, and the reflectance signal changes in phase with the driving modulation i 丸善「略語大辞典」JLogosID : 11852740