略語大辞典 [Chem] 21 ALE atomic layer epitaxy 原子層エピタキシー. 単原子層を制御する薄膜結晶成長法.atomic layer epitaxy; a thin crystal growth which controls a single layer of atoms; e.g. of GaInP; [Chem:Phys:Mat:Opt:L]. 丸善「略語大辞典」JLogosID : 11865486