DLTS
deep-level transient spectroscopy
(半導体中の)深部準位時間分解分光. 半導体中の深い不純物準位の過渡的特性を測定する方法.
deep-level transient spectroscopy; of semiconductors; ref. ICTS(isothermal capacitance(or current) transient spectroscopy); ref. PL(photo-luminescence);
[Phys:C:E].
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